You are looking at a Nikon NRC-504 Reticle Cleaner.
It has an Ebara Jitsugyo EG-2001 Ozone Monitor.
Nikon Laser Power Supply.
Material Handling Robot. I do not know the brand or model because I cannot fully access it.
Moyo Rikagu FMA-4UR NDIR Gas Alarm Meter.
Tokyo Keiso Flow Regulators.
SPC Electronics USG-301H-3AS Ultrasonic Genrator.
Kidde Extinguishing Unit.
Computer and Manuals.