L94572 PlasmaQuest Reactive Ion Etching System RIE Astex MKS

L94572 PlasmaQuest Reactive Ion Etching System RIE Astex MKS

$20,000.00

In stock

Product ID: L94572

You are looking at a PlasmaQuest/Astex/MKS Resctive Ion Etching System RIE Plasma Etcher. It appears to be in good cosmetic condition showing signs of previous use. Please refer to the pictures for more detail. It has a PlasmaQuest AX2110 1000W Microwave Power Generator, 4 MKS Mass Flow Controllers 2 of 1479A52CR1BM and 2 of 1479A13CR1BM, an MKS power supply Type 260 PS-3, an MKS Vapor Source 115A, Astex Head and Plasma Source, and a VAT Gate Valve. The MKS flow controllers were running Nitrogen, Freon, Argon, chlorine, and Hydrogen gases. This also comes with two monitors and a keyboard, there is no computer included with this machine. Unfortunately I do not have any way of actually testing out this item and it is being sold untested as is. Please note that this does not come with any other parts, cables, or accessories.