C171149 Plasmatherm SLR 720 PECVD / 720 RIE Reactive Ion Etch Deposition System

Plasmatherm SLR 730 PECVD /720 RIE • Stand alone Dual chamber 720/720 Deposition & Etch system • PC controlled–windows based system • Plasmatherm 700 Aluminum body chamber • Load Lock Version with (2) two process modules • One PECVD • One RIE (Reactive Ion Etch) • Main body of system (shared components between the two chambers) includes • Stainless Steel Skins • Windows based PC controls • Advanced Energy RFPP - RF5S power supply (500W – 13.56MHz) • Advanced Energy AM5 matching network w/tuner • Leybold D25 or equivalent Load Lock pump • Neslab HX 75 chiller with RS232 interface to system • Electrical Disconnect box - 208V, 3 phase, 60amp • Flat panel display with keyboard & mouse • Full set of manuals • PECVD Module includes • Heated Chuck • Watlow controller • 11” chuck with center lift type • Optical Windows for Endpoint Control & diagnostics • Leybold D40 with 151 blower (min.) Mechanical pump • MKS 290 Ion Gauge controller and Ion gauge • MKS TC gauge controller • 1 or 2 Torr Baratron • 4 gas MFC’s • RIE module includes • Lower electrode • 11” showerhead • 11” chuck – center lift type • Optical Windows for Endpoint Control & diagnostics • Soffie Class III Laser endpoint detector • MKS 153 Throttle valve • Leybold 361C turbo pump • Leybold 150/360 NT turbo controller • Leybold D40BCS mechanical roughing pump • 500mT Baratron • 4 gas MFC’s Specification from a quotation when the University upgraded the system after the original purchase Gas Manifolds and Gas line fabrication and installation service • Fabricate & install (4) additional gas sticks/lines including Nupro valves, (with bypass valves included), unions, glands, VCR fittings, MFCs and gas manifolds in order to serve the existing Plasmatherm Dual Chamber PECVD/RIE System as listed below. • (2) - 4 port manifolds • (2) - gas sticks for Nitrogen and Argon to include nupro valve, mfc and "L" leg to gas connection • (2) - gas sticks with bypass (highly recommended for Cl2 and BCl3), to include 3 nupro valves and mfc • 2 - 4 channel valve control PCB (for the nupro valves) • 1/8" tubing for the nupro valves (~40 ft) • Re-wiring of the valve control PCB connectors to support this up-fit, plugs, pins and wire as necessary • JVIC will need to move the N2 purge inlet connection to its new location (to support the addition of the 4 port manifold • MFCs will be cleaned and calibrated to Nitrogen for the following flow rates • (2) for the PECVD side of the system • Nitrogen – 2000 sccm • Argon – 500 sccm • (2) for the RIE side of the system • BCL3 - 50 sccm • Cl2 – 50 sccm