This Robotic Wafer Handling System for 8" Wafers is composed of a Vacuum Chamber, with a PRI Equipe Technologies Single-Arm Wafer Robot (no nameplate), a VPR-R07-301 PreAligner (built-in to the side of the chamber), a VXR-107 Wafer Boat Elevator inside of a VCR-226-S-M-107 Load Lock Chamber, an ESC-228V Controller with TTR-100 (8045R2-2) Teach Pendant, a VCE-226-S-A-107 Splitter Box, two VAT Gate Valves (02012-BA24-0001/0088 / A-257062 and 02012-BA44-0001/6 / A-202600), and a VAT Pendulum Valve (65040-VA52-0001/0001 / A-261687).
It appears to be missing the Turbo Vacuum Pump; there is a 6" CF Conflat Port on the bottom where it should attach.
This system looks to be in good cosmetic condition, showing some minor signs of wear. There is a damaged Convectron Vacuum Gauge on the side of the Load Lock Chamber.
I plugged the Robot Controller in, and the fan and power light came on, but the Teach Pendant did not power up, so I opened up the controller, and found that the board that the Teach Pendant plugs into was not plugged into the motherboard. I plugged it back in, and powered the controller up again, and this time the Teach Pendant did power up, and ran some memory tests, which passed, but then nothing else came on the display, although it did beep when its buttons were pressed. Then I noticed that the Error light was illuminated on the front of the controller. So this is obviously an issue which will need to be resolved.
This is the extent of my testing of this system; I lack the knowledge and equipment to test it any further, and it is being sold as-is.
Approximate overall unpacked dimensions: 69"L x 62"W x 59"H. Due to the size and weight of this system, a custom pallet or crate will be required to ship it, the cost of which will be the responsibility of the buyer.
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